Excimer Laser_Compex205 System
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Compex205 System
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Wavelength
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248nm
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Pulse Energy
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750 mJ
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Max. Rep. Rate
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50Hz
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Average Power
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33W
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Energy Stability(1 sigma)
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≤0.75 %
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Pulse Duration(FWHM)
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25 ns
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Beam Dimensions(V×H, FWHM)
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24×10 mm2
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Beam Divergence(V×H, FWHM)
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≤3×1mrad2
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Beam Pointing Stability(1 sigma)
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≤50rad
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Cooling
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Water
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Weight
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350Kg
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Electrical
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230V±10%, 16A
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