Pulsed Laser Deposition
Pulsed Laser Deposition
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Pulsed Laser Deposition
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Observation window
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1x DN 100CF, 1x DN 63CF
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Laser incident window
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1x DN 63CF
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Sample stage
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2Inch
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Target stage
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1Inch
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Heater
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~800℃
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Vacuum degree
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~5*10-8 mbar
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Molecular pump outlet
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1x DN 160CF
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Front vent
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1x DN 40CF
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Bypass vent
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1x DN 40CF
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Vacuum gauge
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~10-9mbar
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Quick opening interface
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1x DN 100CF
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Gas inlet
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2x DN 16CF
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Pulsed Laser Deposition
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观察窗
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1x DN 100CF, 1x DN 63CF
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激光入射
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1x DN 63CF
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样品台
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2Inch
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靶台
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1Inch
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加热器
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~800℃
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真空度
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~5*10-8 mbar
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分子泵抽气口
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1x DN 160CF
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前级抽气口
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1x DN 40CF
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旁路抽气口
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1x DN 40CF
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真空计
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~10-9mbar
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快开门接口
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1x DN 100CF
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气体入口
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2x DN 16CF
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